A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH₃)₂Cl]₂

• Elif Bilgilisoy,
• Ali Kamali,
• Thomas Xaver Gentner,
• Gerd Ballmann,
• Sjoerd Harder,
• Hans-Peter Steinrück,
• Hubertus Marbach and
• Oddur Ingólfsson

Beilstein J. Nanotechnol. 2023, 14, 1178–1199, doi:10.3762/bjnano.14.98

• purification studies [62][63], thin layer exposure to electrons at approx. 500 eV [64][65], gas-phase studies under single collision condition [28][66], and FEBID under HV and UHV conditions [30][60]. Most noticeably, platinum precursors Pt(CO)2X2 (X = Cl, Br) have been studied with respect to FEBID and their

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

• Cristiano Glessi,
• Aya Mahgoub,
• Cornelis W. Hagen and
• Mats Tilset

Beilstein J. Nanotechnol. 2021, 12, 257–269, doi:10.3762/bjnano.12.21

• for gold compounds. The difference between the bromide and chloride ligands has been investigated [47] for platinum precursors. It was shown that under the tested conditions, the chloro compound performed better than the bromo compound in terms of composition and growth rate [47]. Compound 6 is a

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

• Aya Mahgoub,
• Hang Lu,
• Rachel M. Thorman,
• Konstantin Preradovic,
• Titel Jurca,
• Lisa McElwee-White,
• Howard Fairbrother and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800, doi:10.3762/bjnano.11.161

• platinum precursors, Pt(CO)2Cl2 and Pt(CO)2Br2, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a

• -dispersive X-ray spectroscopy (EDX); focused electron beam-induced deposition (FEBID); nanofabrication; platinum precursors; scanning electron microscopy (SEM); thermogravimetric analysis (TGA); Introduction Focused electron beam-induced deposition (FEBID) is a direct-write nanopatterning technique. FEBID

• respect but are thermally unstable, for instance, ClAuCO and ClAuPF3 [11][12][13]. Therefore, it is desirable to design new stable precursors that enable the deposition of pure metals. In this work, two novel platinum precursors (Pt(CO)2Cl2 and Pt(CO)2Br2) were synthesized and tested. Both Pt(CO)2X2

A novel copper precursor for electron beam induced deposition

• Caspar Haverkamp,
• George Sarau,
• Mikhail N. Polyakov,
• Ivo Utke,
• Marcos V. Puydinger dos Santos,
• Silke Christiansen and
• Katja Höflich

Beilstein J. Nanotechnol. 2018, 9, 1220–1227, doi:10.3762/bjnano.9.113

• height measured in the middle of the pads. Using this method, the high edges of the pad and the slants of the sides were neglected. The resulting volume deposition rate R = 0.026 µm3·nA−1·min−1 is comparable to the deposition rate of common platinum precursors [15]. However, it has to be pointed out that